High-Purity Pressure Transducers

Designed for semiconductor gas delivery systems and ultra-clean specialty gas applications.

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Applications

Semiconductor Gas Delivery Systems

Semiconductor manufacturing relies on ultra-high-purity gases such as nitrogen, argon, and specialty process gases. Gas cabinets and valve manifold boxes regulate and distribute these gases safely to process tools.

Semiconductor Process Equipment

Semiconductor equipment manufacturers integrate pressure sensors into process tools such as CVD, ALD, and etch systems. Accurate pressure monitoring ensures gases are delivered at the correct pressure and flow conditions during wafer processing.

Products

Honeywell 13V Pressure Sensor

Ideal for ultra-high purity applications

The Honeywell 13V stainless steel pressure sensor is designed for HP/UHP clean rooms used in semiconductor wafer processing, thin-film deposition for solar panels/displays, food and beverage processing/packaging, aircraft and medical device manufacturing, nano-drug/biopharmaceutical production, and advanced R&D labs

  • SEMI F20 compatible: For ultra-high purity applications (purity level > 99.999%)
  • Excellent Stability under Harsh Conditions: Offset shift of < 0.1% FS under extreme vacuum at 1 mPa for months at maximum temperature of 90°C
  • Small form factor: 13 mm diameter offering with 4/6 pin output design to suit end application requirements
  • Minimal output drift: Temperature compensation done at the transducer output level
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Honeywell HPT Pressure Sensor

Ideal for high purity applications

Honeywell HPT series pressure transducer is designed for measurement of gases in facility gas delivery systems. These systems are designed for delivery of gases from a central source to the point of use. They are often of high purity and corrosive

  • Long-Term Stability: Total Error Band (TEB) as low as ±1.5 %FSS within -20°C to 85°C [-4°F to 185°F] and ±0.25 %FSS accuracy
  • Robust EMC Performance: Operate reliably in the presence of electromagnetic fields
  • Excellent Corrosion Resistance: The low-carbon 316L stainless steel offers excellent corrosion resistance for highly corrosive process gases, and the VIM-VAR dual stage refining process ensures ultra-high purity
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