Honeywell 13V Pressure Sensor

Overview

  • SEMI F20 compatible
  • 316L stainless steel
  • Media isolated
  • For High Purity (HP) and Ultra-High Purity (UHP) applications

The Honeywell 13V stainless steel pressure sensor is designed for HP/UHP clean rooms used in semiconductor wafer processing, thin-film deposition for solar panels/displays, food and beverage processing/packaging, aircraft and medical device manufacturing, nano-drug/biopharmaceutical production, and advanced R&D labs.

Benefits

  • SEMI F20 compatible – sensor suitable for UHP application
  • Excellent offset drift – low offset shift during prolonged vacuum and high temperature making it versatile for multiple applications
  • Port compatible with multiple gases – savings from maintaining a single product
  • Structured for high-volume manufacturing setup – capable of absorbing high demand orders

Special attention is paid to the material selection. The internal design is optimized to meet the most stringent metal-alloy impurity and surface roughness standards in applications that involve measurement of gases and liquid flow in harsh environments. Designed with a SEMI F20 compatible ring and diaphragm, this sensor exhibits exceptional corrosion resistance to the aggressive nature of halogenated gases commonly encountered in semiconductor manufacturing processes. Its robust construction ensures minimal offset drift even when exposed to extreme vacuum and high temperature condition while maintaining accurate pressure measurement.

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